The SainTech XIAD Ion System has been specially developed to provide a cost effective solution for ion-based vacuum processes for small to medium sized deposition systems. The XIAD provides an extremely reliable and maintenance-free facility for many applications in PVD processes. The compact design and rugged construction allows easy installation to both new and existing vacuum deposition systems.
XIAD Features:
- Ion beam energies up to 230eV
- Ion Beam power to 1.0 kilowatts
- Beam currents to 5 amps
- Full-time use of high purity oxygen
- Special Coiled Filaments provide lifetimes up to 12 hours in pure oxygen
Options Available
Dual Gas DG. Option provides facility to deliver either of two installed gases in either pure gas or specified gas mix ratio. Gas mixture is set from the touch screen.
Mounting Hardware MH. Several options are available. The mounting brackets are clamped to a special gas feed-through.
Complete Series III XIAD package includes:
- XIAD Ion Source
- XIAD Series III Power supply – 200 -250 VAC, single phase 50 or 60Hz; 10 amps
- Gas flow controller supplied 25 sccm (oxygen)
- Operational, maintenance and service manual
- All feed-throughs – gas, electrical and water
